Modular AI Defect Inspection Solution Enhances Semiconductor Equipment Upgrades
Technology Category
- Drones - Drone Payloads & Accessories
- Functional Applications - Manufacturing Execution Systems (MES)
Applicable Industries
- Equipment & Machinery
- Semiconductors
Applicable Functions
- Maintenance
- Quality Assurance
Use Cases
- Infrastructure Inspection
- Security Claims Evaluation
Services
- Testing & Certification
- Training
The Challenge
The semiconductor equipment manufacturer needed to upgrade their EUV pod inspection machines with AI features to trace the cause of defects in the manufacturing process.
The Customer
Smasoft Technology Co., Ltd.
About The Customer
The customer is a semiconductor equipment manufacturer that manufactures Extreme Ultraviolet Light (EUV) pod inspection machines.
The Solution
Smasoft implemented two sets of software, AINavi-AOI-Seq and AINavi-AOI-Semicon, to analyze images, classify defects, and generate quality inspection reports. Advantech provided a modular hardware solution with high computing performance and stable operation.
Quantitative Benefit
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